Bücher von Michael Nastasi

This book explains the basic characteristics of ion beams as applied to the analysis of materials, as well as IBA of art/archaeological objects. It focuses on the fundamentals and applications of ion beam methods of materials characterization. It starts with coverage of the fundamentals of ion beam analysis, including kinematics, ion stopping, R

Ion implantation is one of the key processing steps in silicon integrated circuit technology. This book presents the physics and materials science of ion implantation and ion beam modification of materials.