Bücher von Toh-Ming Lu

Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed. This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.

This book covers basic principles of reflection high-energy electron diffraction (RHEED), gives examples of RHEED measurements of texture and texture evolution of thin films and nanostructures, describes construction of surface RHEED pole figures and more.

This book presents a unified approach to understanding the diverse phenomena observed at metal-dielectric interfaces. It offers a clear account of the relationship between interface science and its applications in interconnect structures.

The focus of this book is on modeling and simulations used in research on the morphological evolution during film growth. The book will enable readers themselves to set up a computational program to investigate specific topics of interest in thin film deposition.