Bücher der Reihe Microtechnology and MEMS

Piezoceramic Sensors provides an up-to-date overview of various types of piezosensors. Readers will gain an understanding of the fundamentals, technical design and practical applications of piezoceramic sensors, in addition to new measuring techniques.

This tutorial book offers an in-depth overview of the fundamental principles of micro/nano technologies and devices related to sensing, actuation and diagnosis in fluidics and biosystems.

This book presents the basics and methods of nanoscale analytical techniques for tribology field. The applied methods are atom probe tomography, in situ TEM, SERS, NEXAFS, in situ XPS, nanoindentation and in situ Raman spectroscopy.

This tutorial book offers an in-depth overview of the fundamental principles of micro/nano technologies and devices related to sensing, actuation and diagnosis in fluidics and biosystems.

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle.

This is the most comprehensive book on the basics, realization and applications of micromechanical photonics. Its purpose is to give the engineering student and the practical engineer a systematic introduction to optical MEMS (Micro electro mechanical systems) and micromechanical photonics.

Covers CMOS chemical microsensor systems. This book presents information on important issues related to the realization of chemical microsensors in CMOS technology. It also presents the fundamentals of chemical sensing.

Electroacoustic transducers (EAT) are devices, which transform electric energy to energy of acoustic fluctuations. Methods and control units of transducers in batch production of transducers are described, too.

This book introduces the fundamentals of piezotronics and piezo-phototronics, and shows how the functionality of piezotroics and piezo-phototronics are complementary to CMOS technology. Describes applications in sensing, nanorobotics and many other areas.

Discusses the use of capillary forces as a gripping principle in microscale assembly. This book presents the physical concepts at the microscale with practical applications in micromanipulation. It is suitable for researchers and engineers involved in micromanipulation and precision assembly.

Addresses the use of MEMS (micro-electro-mechanical systems) and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology.

Surface Tension in Microsystems

This book provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle.

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.

This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

Addresses the use of MEMS (micro-electro-mechanical systems) and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology.

Overview of recent achievements, describing the microactuator development of microvalves and liner actuators comprehensively from concept through prototype. Further key aspects included are three-dimensional models for handling complex SMA actuator geometries and coupled simulation routines that take multifunctional properties into account.

This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype.

Beginning with an overview of nanomachining, this monograph introduces the relevant concepts from solid-state physics, thermodynamics, and lattice structures. It then covers modeling of thermal transport at the nanoscale and details simulations of different processes relevant to nanomachining.

The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing.

This book describes the application of piezoelectric materials, particularly piezoceramics, in the wide field of actuators and sensors. It gives a step-by-step introduction to the structure and mechanics of piezoelectric beam bending actuators in multilayer technology, which are of increasing importance for industrial applications.

The textbook is suitable both for graduate students and for engineers working in the fields of electrical engineering, information technology, mechatronics, microtechnology, and mechanical and medical engineering.

Laser Diode Microsystems provides the reader with the basic knowledge and understanding required for using semiconductor laser diodes in optical microsystems and micro-optical electromechanic systems.

This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors.