Bücher der Reihe Updates in Applied Physics and Electrical Technology

This book has been written as part of a series of scientific books being published by Plenum Press. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI.

On a different front, the rapid advance of fibre sensors, previously drawing heavily on the communications technology, is becoming a major driving force in the development of fibres and other components.

This book is t~e fifth in aseries of scientific textbooks designed to cover advances in selected research fields from a basic and general view point.

This book has been written as part of a series of scientific books being published by Plenum Press. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI.

On a different front, the rapid advance of fibre sensors, previously drawing heavily on the communications technology, is becoming a major driving force in the development of fibres and other components.

This book is t~e fifth in aseries of scientific textbooks designed to cover advances in selected research fields from a basic and general view point.