Bücher der Reihe Nano- and Microscience, Engineering, Technology and Medicine

The technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings together the various paradigms, methods, techniques, and technologies associated with MEMS and NEMS in a presentation accessible to a broad audience.

Presents an understanding of the engineering underpinnings of integrated technology and develops a modern picture of MEMS engineering. This work emphasizes the modeling, simulation, analysis, design and implementation of high-performance mini - and microscale electromechanical systems.

Containing a survey of research across a wide range of disciplines, this book provides contemporary knowledge and understanding of the phenomena of nanometer-scale particle manipulation. It explores how electromechanics can be applied to the sorting of DNA molecules, examining viruses, and constructing electronics devices with carbon nanotubes.