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Micro Electronic and Mechanical Systems

Über Micro Electronic and Mechanical Systems

This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.

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  • Sprache:
  • Englisch
  • ISBN:
  • 9789533070278
  • Einband:
  • Gebundene Ausgabe
  • Seitenzahl:
  • 528
  • Veröffentlicht:
  • 1. Dezember 2009
  • Abmessungen:
  • 244x170x29 mm.
  • Gewicht:
  • 1034 g.
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Beschreibung von Micro Electronic and Mechanical Systems

This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.

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